A, B, C, D, E, F, G, H, I, J, K, L, M, N, O, P, Q, R, S, T, U, V, W, X, Y, Z,
| A, | |
| Abbreviations; Index of | [1], [2], |
| Absorption coefficient; measurement | [1], [2], |
| Acceleration sensor; MEMS | [1], |
| Accidental discoveries | [1], |
| Accumulation | [1], [2], |
| Actuator; MEMS | [1], |
| Actuators; electrostatic | [1], |
| Actuators; MEMS | [1], |
| Actuators; thermal | [1], |
| Adhesion | [1], |
| Advanced | [1], [2], |
| Affordability; of solar energy | [1], |
| Air bags; MEMS | [1], |
| Air mass; solar cell | [1], |
| Alignment for steppers | [1], |
| Alignment in lithography | [1], |
| American president | [1], |
| Amorphization by ion implantation | [1], |
| Amorphous Si | [1], |
| Amorphous thin films | [1], |
| Anisotropic chemical etching | [1], |
| Anisotropic eching | [1], |
| Anodic oxidation | [1], |
| Anti-reflection coating | [1], |
| Applications | [1], |
| Area; needed for solar power | [1], |
| Arsenic; elemental semiconductor | [1], |
| Arsine | [1], [2], |
| Art of crystal growing | [1], |
| Aspect ratio | [1], |
| Atomic force microscope | [1], [2], |
| Auger recombination | [1], [2], |
| Average roughness | [1], |
| B, | |
| Back-end; MEMS | [1], |
| Back-surface field; solar cell | [1], |
| Backbone I module | [1], [2], |
| Backbone II module | [1], [2], |
| Band gap | [1], |
| Band gap; ternary compounds | [1], |
| Band-band recombination | [1], [2], |
| Bandgap engineering | [1], |
| Bandgap type; ternary compound | [1], |
| Bandgap; defining quality | [1], |
| Barrel reactor | [1], |
| Base of bipolar transistor | [1], |
| Base; of solar cell | [1], [2], |
| Basics modules | [1], [2], |
| Batch process | [1], [2], |
| Beamer | [1], |
| Beamers; and MEMS | [1], |
| Better; central credo | [1], |
| Bio fuel | [1], |
| Bipolar transistor | [1], |
| Bipolar transistors | [1], |
| Birds beak | [1], |
| Black art; CIGS solar cells | [1], |
| Black art; wet etching | [1], |
| Blue ray disc | [1], |
| Bold script for index words | [1], [2], |
| Bonding techniques | [1], |
| Books: Heuberger | [1], |
| Books: Muench | [1], |
| Books: Ohrring | [1], |
| Books: Smith | [1], [2], |
| Bosch process | [1], |
| Bosch: and MEMS | [1], |
| Buckling; of thin films | [1], |
| Buffer layer; solar cell | [1], |
| Buffer oxide | [1], [2], |
| Bulk microdefects | [1], |
| Bulk Si solar cell | [1], |
| Buried layer | [1], |
| C, | |
| Cantilevers; and MEMS | [1], |
| Capacitive sensing | [1], |
| Capacitor dielectric | [1], |
| Capillary forces; MEMS | [1], |
| Car; and power | [1], |
| Carrier type and concentration; measurement | [1], |
| Casimir Effect; and NEMS | [1], |
| Casting; multi-crystalline Si | [1], |
| Cavities; and MEMS | [1], |
| Central credo; semiconductor technology | [1], |
| Chalcogenides; semiconductor | [1], |
| Channel in a MOS transistor | [1], |
| Cheaper; central credo | [1], |
| Chemical dry etching | [1], |
| Chemical etching; anisotropic | [1], |
| Chemical mechanical polishing | [1], [2], |
| Chemical properties | [1], |
| Chemical vapor deposition | [1], |
| Chemical-mechanical polishing | [1], [2], |
| Chemisorbtion | [1], |
| Chip | [1], |
| Chip area | [1], |
| Chip power dissipation | [1], |
| Chip size development | [1], |
| Chip; definition | [1], |
| Chip; factory for making | [1], |
| Chips | [1], |
| Chips; as components | [1], |
| CIGS production | [1], |
| Cleaning of equipment | [1], |
| Cleanroom | [1], [2], |
| cleanroom garments | [1], |
| Cleavage planes in semiconductors | [1], |
| Climate catastrophe | [1], |
| Climate change; and ST | [1], |
| Collector | [1], |
| Columnar grains in multi-crystalline Si | [1], |
| Columns in module matirx | [1], [2], |
| Comparison of feature size; of ICs | [1], |
| Compliant substrates | [1], |
| Components; and semiconductor technology | [1], |
| Compound semiconductors | [1], [2], |
| Compromising; the art of making solar cells | [1], |
| Concentrator solar cell | [1], |
| Conductivity; measurement | [1], |
| Conjugated bonds; org. semiconductors | [1], |
| Constant current generator; solar cell | [1], |
| Consumption; of energy | [1], |
| Contact angle | [1], |
| Contact hole | [1], |
| Contact resistance | [1], |
| Contacts; and solar cells | [1], |
| Convection | [1], |
| Copper-Indium-Gallium-Selenide; solar cell | [1], [2], [3], |
| Coriolis force | [1], |
| Corrosion resistance; measurements | [1], |
| Cost decrease; solar cell | [1], |
| Costs; of solar energy | [1], [2], [3], |
| Critical current density | [1], [2], |
| Critical siez; for nuclei | [1], |
| Cross-sensitivity;_sensor | [1], [2], |
| Crucible growth | [1], |
| Crystal defects in chips | [1], |
| Crystal detector radio | [1], |
| Crystral structures; of most semiconductors | [1], |
| Cu - In - Ga - Se - S compound | [1], |
| Cu - In - Se | [1], |
| Current matching; multi-junction solar cell | [1], |
| Czochralski | [1], |
| Czochralski method of crystal growth | [1], |
| Czochralski method; crystal growth | [1], |
| D, | |
| Damped driven oscillator; and MEMS | [1], |
| Dangling bonds | [1], [2], [3], |
| Dash process | [1], [2], [3], |
| Deal-Grove model | [1], |
| Deep level recombination channel | [1], |
| Deep levels | [1], |
| Deep ultra-violet | [1], |
| Defect properties | [1], |
| Defect recombination | [1], [2], |
| Defects on chips. | [1], |
| Deflection detection; MEMS | [1], |
| Density and porosity; measurement | [1], [2], |
| Depletion | [1], |
| Depth of focus | [1], |
| Design rules | [1], |
| Designers | [1], |
| Desorption | [1], |
| Diamond structure | [1], |
| Diamond; elemental semiconductor | [1], |
| Dictionary English - German | [1], [2], |
| Dielectric breakdown field strength; measurements | [1], |
| Dielectric constant; of semiconductors | [1], |
| Dielectric failure | [1], |
| Dielectric function | [1], |
| Dielectric function; measurement | [1], |
| Diffractrometer, neutron; and Si | [1], |
| Diffusion barrier | [1], [2], |
| Diffusion lenght; IU characteristics | [1], [2], |
| Diffusion limited oxidation reaction | [1], |
| Diffusion profile | [1], |
| Diffusion; solar cell | [1], |
| Digital light processing | [1], [2], |
| Digital micromirror device | [1], |
| Digital versatile disc | [1], |
| Direct energy consumption | [1], |
| Direct recombination | [1], [2], |
| Direct sun light | [1], |
| Directionality of sunlight | [1], |
| Discontinuity; hetero junctions | [1], |
| Disloactions; and stress relaxation | [1], |
| Dislocations; as device killers | [1], |
| Display; OLED | [1], |
| Displays; optoelectronic | [1], |
| Doping by diffusion | [1], |
| Doping organic semiconductors | [1], |
| Doping; prime technical property | [1], |
| Dose of ion implantation | [1], |
| Drain | [1], |
| Drain of a MOS transistor | [1], |
| Driven damped oscillator; and MEMS | [1], |
| Dry etching | [1], |
| Dry etching; MEMS | [1], |
| Dry oxidation | [1], |
| Dynamic random access memory | [1], [2], |
| E, | |
| Earth | [1], |
| Ecercises | [1], [2], |
| Edge coverage | [1], |
| Edge dislocations; and steps | [1], |
| Edge dislocations; misfit | [1], |
| Edge Isolation; solar cell | [1], |
| Edge rounding | [1], |
| Efficiency increase; solar cell | [1], |
| Efficiency; LED | [1], |
| Efficiency; of light generation | [1], |
| Efficiency; solar cell | [1], [2], |
| Efficiency;_of_solar_cell | [1], |
| Effusion cell | [1], |
| Elastic moduli; thin films | [1], [2], |
| Electrical break down field strength | [1], |
| Electrical breakdown | [1], |
| Electrical properties; thin films | [1], [2], |
| Electrochemical etching | [1], |
| Electrolyte; solar cell | [1], |
| Electromigration | [1], |
| Electron beam lithography | [1], [2], |
| Electron microcopes; for seeing | [1], |
| Electron microscope; scanning | [1], |
| Electronic grade Si | [1], |
| Electrostatic actuators | [1], |
| Elements; and semiconductors | [1], |
| Ellipsometer | [1], |
| Ellipsometry | [1], |
| Emerging technology; MEMS | [1], |
| Emitter of a bipolar transistor | [1], |
| Emitter; of a solar cell | [1], [2], |
| Emitter; of solar cell | [1], |
| Enabling device; Laser | [1], |
| Enabling technology; MEMS | [1], [2], |
| Energieeinspeisegesetz | [1], |
| Energy consumption | [1], |
| Energy crisis; and ST | [1], |
| Energy harvesting | [1], |
| Energy pay back time | [1], |
| Energy pay-back time; solar cells | [1], |
| Energy plants | [1], |
| Energy; definition | [1], |
| Energy; solar cell | [1], |
| Engineer mode | [1], |
| Epitaxial growth | [1], |
| Epitaxy | [1], [2], |
| Equipment | [1], |
| Equivalent circuit diagram of a solar cell | [1], |
| Etching structures | [1], |
| Etching techniques | [1], |
| Excimer lasers; for lithography | [1], |
| Exciton; and LED | [1], |
| Exciton; LED | [1], |
| Expansion of Si; at crystallization | [1], |
| Extreme UV lithography | [1], |
| F, | |
| Feature size; of ICs | [1], |
| Feed_back;_Laser | [1], |
| Feed_back;_Laser_ | [1], |
| Fermi level pinning | [1], |
| Field oxide | [1], [2], [3], |
| Field strength | [1], |
| Fill factor, of a solar cell | [1], [2], |
| Fill factor; solar cell | [1], |
| First Laser condition | [1], |
| First law of material science | [1], |
| First silicon | [1], [2], |
| Fitting parameters; solar cell | [1], |
| Flat band MOS condition | [1], |
| Flat panel display | [1], |
| Flat panel display; OLED | [1], |
| Flat panel displays | [1], |
| Flats (on wafers) | [1], |
| Flats; on wafers | [1], |
| Float zone | [1], [2], |
| Flow glass | [1], |
| Focus depth | [1], |
| Force; capacitive | [1], |
| Format Hyperscript | [1], [2], |
| Fracture; for stress relaxation | [1], |
| Fracture; measurement | [1], |
| Frank-van der Merve growth mode | [1], |
| Fraunhofer Institute for Si Technology | [1], |
| Friction; MEMS | [1], |
| Front end; MEMS | [1], |
| Fundamental absorption | [1], |
| G, | |
| g-sensors; MEMS | [1], |
| Galvanic techniques | [1], |
| Gate dielectric | [1], [2], |
| Gate electrode | [1], [2], |
| Gate of a MOS transistor | [1], |
| Gate oxide | [1], |
| Gate_oxide | [1], |
| Gate_oxide_ | [1], |
| Gear wheels; and MEMS | [1], |
| General properties of thin films; measurement | [1], |
| Generation sequence; of chips | [1], |
| Geometry and topology; measurement | [1], |
| Geometry; thin film | [1], |
| Germanium; crystal growth | [1], |
| Germanium; elemental semiconductor | [1], |
| Gettering | [1], |
| Gettering; solar cell | [1], |
| Global properties of solar cells | [1], |
| Gold leaf | [1], |
| Graetzel cell | [1], |
| Graetzel solar cell | [1], |
| Green house effect; and ST | [1], |
| Grid parity | [1], |
| Grid; solar cell | [1], |
| Gyro; process integration | [1], |
| H, | |
| Hall coefficent | [1], |
| Heating with light | [1], |
| Hetero junction; CIGS | [1], |
| Hetero junctions | [1], |
| Hetero-junction; CIGS solar cell | [1], |
| Hexagonal structure | [1], |
| High explosives; and Si | [1], |
| High injection approximation | [1], |
| High resolution TEM | [1], |
| High-efficiency multi-junction solar cells | [1], |
| High-rate plasma etching | [1], |
| Highest occupied molecular orbital | [1], |
| Homo junction | [1], |
| Human hair; as thinness gauge | [1], |
| Humans | [1], |
| Hydrogen passivation | [1], [2], |
| Hyperscript; format of | [1], [2], |
| I, | |
| Illustration modules | [1], [2], |
| Index grating | [1], |
| Index of abbreviations | [1], [2], |
| Index of key words | [1], [2], |
| Index of names | [1], [2], |
| Index of refraction; ternary compound | [1], [2], [3], [4], |
| Infra red optics | [1], |
| Injection ratio | [1], |
| Inkjet | [1], |
| Input; to sensor | [1], |
| Integrated capacitor | [1], |
| Integrated circuit | [1], [2], [3], [4], |
| Integrated circuits; and semiconductor properties | [1], |
| Integrated transistor | [1], |
| Intel | [1], |
| Interference color: thin film | [1], |
| Intergrated circuit | [1], |
| Intermetal dielectric | [1], [2], |
| Internal gettering | [1], |
| Intrinsic length scales | [1], |
| Inversion | [1], [2], [3], |
| Inverter; and CMOS | [1], |
| Ion beam lithography | [1], |
| Ion getter pumps | [1], |
| Ion implantation | [1], [2], |
| Island growth mode | [1], |
| J, | |
| Jet engine; and power | [1], |
| Joule; definition | [1], |
| Junctions; and solar cells | [1], |
| K, | |
| Key word index | [1], [2], |
| Kilogram standard; and Si | [1], |
| Knudsen effusion cell | [1], |
| L, | |
| Large amounts of money: in chip production | [1], |
| Laser | [1], |
| Laser ablation | [1], |
| Laser diodes | [1], |
| Laser; and semiconductor property | [1], |
| Lattice constant ternary compounds | [1], |
| Lay-out of a chip | [1], |
| Layer deposition by sputtering | [1], |
| Layer plus island growth mode | [1], |
| Layer-by-layer growth mode | [1], |
| Layered semiconductors | [1], |
| Leads; on integrated circuits | [1], |
| Learning curve | [1], [2], |
| Li ion batteries; and porous Si | [1], |
| Life time; of LED's | [1], |
| Light emission | [1], |
| Light emitting diodes | [1], [2], [3], |
| Light; and power | [1], |
| Light; and solar cells | [1], |
| Light_emitting_diodes | [1], [2], |
| Limits of solar cell efficiency | [1], |
| Line | [1], |
| Liquid crystal display | [1], [2], [3], [4], [5], |
| Liquid encapsulation technique | [1], [2], |
| Liquid immersion lithography | [1], |
| Lithography | [1], [2], |
| Load management; solar cell | [1], |
| Load resistance; solar cell | [1], |
| Load; on solar cells | [1], |
| Local oxidation of Silicon | [1], |
| Local properties of solar cells | [1], |
| Low k dielectrics | [1], |
| Low pressure CVD | [1], |
| Lowest unoccupied molecular orbital | [1], |
| Lubrication; importance of | [1], |
| Lubrication; MEMS | [1], |
| Lumen; definition of unit | [1], |
| M, | |
| Magic; and semiconductor technology | [1], |
| Magnetic resonance tomography | [1], |
| Magnetic sensing | [1], |
| Maser | [1], |
| Mask | [1], |
| Masking; with SiO2 | [1], |
| Masks for lithography | [1], |
| Master Graph; for semiconductors | [1], |
| Materials Research Society | [1], |
| Materials Scientists | [1], |
| Matrix of modules | [1], [2], |
| MBE | [1], |
| Measuring IV characteristics of solar cells | [1], |
| Measuring thin film thickness | [1], |
| Mechanical properties; measurement | [1], [2], |
| Melting point density anomaly, of Si | [1], |
| Membranes; and MEMS | [1], |
| MEMS products | [1], |
| MEMS specialities | [1], |
| Metallurgical grade Si | [1], |
| Metamaterials | [1], |
| Micro crystalline Si solar cell | [1], |
| Micro Electro Mechanical Systems | [1], |
| Micro electronic and mechanical systems; and semiconductor properties | [1], |
| Microelectronic; definition | [1], |
| Microfluidics | [1], |
| Micropipes; in SiC | [1], |
| Microrelectronic and mechanical systems | [1], |
| Minimal feature size | [1], |
| Mirrors, x-ray; and Si | [1], |
| Mirrors; Laser | [1], |
| Misfit dislocations | [1], |
| Misfit; and epitaxial growth | [1], |
| Mismatch thermal expansion coefficient | [1], |
| Misorientation; od substrates | [1], |
| Mobility; measurement | [1], |
| Module matrix | [1], [2], |
| Modules; solar cell | [1], |
| Molecular beam epitaxy | [1], [2], [3], |
| Money; and semiconductor technology | [1], |
| Money; and solar cells | [1], |
| Money; integral part of ST | [1], |
| Monochromatic light ; Laser | [1], |
| Moore's law | [1], [2], |
| Moore's law break down | [1], |
| MOS technology | [1], |
| MOS transistor; basics | [1], |
| MOS transistors | [1], |
| Movement; detection im MEMS | [1], |
| Mulit level metallization | [1], |
| Multi crystalline Si | [1], [2], |
| Multi crystalline solar cell | [1], |
| Multi junction solar cell | [1], |
| N, | |
| n - channel MOS | [1], |
| n-channel MOS | [1], |
| Names: Indiex of | [1], [2], |
| Nano technology | [1], |
| Nanoparticles | [1], |
| Nanowires | [1], |
| Nanowires; Si | [1], |
| Native oxide | [1], |
| Necking process | [1], |
| Negative resists | [1], |
| Neutron diffractometer; and Si | [1], |
| Newton fringes | [1], |
| Nichia | [1], |
| Non-linear optical properties; measurement | [1], |
| Notch; on a wafer. | [1], |
| Notches (on wafers) | [1], |
| Nucleation of thin films | [1], |
| Nuclei; for thin film growth | [1], |
| Numerical aperture | [1], |
| O, | |
| Oil resources | [1], |
| Open circuit voltage; solar cell | [1], [2], |
| Open circuit; solar cell | [1], |
| Optical fibres | [1], |
| Optical properties; thin films | [1], [2], |
| Optical sensing | [1], |
| Optical sensor | [1], |
| Optical sensors | [1], |
| Optics | [1], |
| Optics; thin film | [1], |
| Optimal working point; solar cell | [1], [2], |
| Optoelectronic, and thin films | [1], |
| Optoelectronics | [1], |
| Optoelectronics defined | [1], |
| Optoelectronics_ | [1], |
| Organic conductor | [1], |
| Organic LED's | [1], |
| Organic light emitting diode | [1], [2], |
| Organic semiconductors; solar cells | [1], [2], [3], |
| Oscillator; and MEMS | [1], |
| Osram | [1], |
| Oxidation induced stacking faults | [1], |
| Oxide capacitance | [1], |
| Oxide CVD | [1], |
| Oxide deposition | [1], |
| Oxide Nitride-Oxide triple layer | [1], |
| P, | |
| p - channel MOS | [1], |
| Packaging MEMS | [1], |
| Parallel plate reactor | [1], |
| Parameter space; etching | [1], |
| Parasitic capacity | [1], |
| Parasitic transistors; in MOS | [1], |
| Particles | [1], |
| Particles_ | [1], |
| Passivation, of dangling bonds | [1], |
| Passivation; of Si devices | [1], |
| Passivation; solar cell | [1], |
| Pellicle | [1], |
| Penetration depth; of light | [1], |
| Phase boundary; hetero junction | [1], |
| Phase coherence; Laser | [1], |
| Phase diagram of quartz | [1], |
| Phosphine | [1], [2], |
| Phosphorous elemental semiconductor | [1], |
| Photo current; in junction | [1], |
| Photo potential; of junction | [1], |
| Photo resist | [1], [2], [3], |
| Photon; and quasi particles | [1], |
| Photonic crystals; and Si | [1], |
| Physical vapor transport; for SiC crystal growth | [1], |
| Physisorption | [1], |
| Piezoelectric materials; and MEMS | [1], |
| Piezoelectric_effect | [1], |
| Piezoresistive effect | [1], |
| Planarization | [1], |
| Planarization; and MEMS | [1], |
| Planet | [1], |
| Plasma | [1], |
| Plasma enhanced CVD | [1], |
| Plasma etching | [1], |
| Plasma etching; MEMS | [1], |
| Plasma oxide | [1], |
| Plastic deformation; stress relief | [1], [2], |
| pn-junction; for solar cells | [1], |
| POCl process | [1], [2], |
| Polariton; uses | [1], |
| Poly | [1], |
| Poly Si for crystal growth | [1], |
| Poly silicon: Variants | [1], |
| Polyimide | [1], |
| Polysilicon layers | [1], |
| Polytypes; of SiC | [1], |
| Polytypie | [1], |
| Porous silicon | [1], |
| Positive resist | [1], |
| Power plant | [1], |
| Power; defintion | [1], |
| Power; solar cell | [1], |
| Power;_and_optoelectronics | [1], |
| Pressure sensor; MEMS | [1], |
| Price per function | [1], |
| Primary energy | [1], |
| Printing contacts; solar cell | [1], |
| Process flow | [1], |
| Process integration | [1], |
| Process steps | [1], |
| Process window | [1], |
| Process-induced defects | [1], |
| Processing time; solar cell | [1], |
| Product; result of ST | [1], |
| Products | [1], |
| Products; and semiconductor technology | [1], |
| Products; MEMS | [1], |
| Properties; thin film | [1], |
| Pumping a Laser | [1], |
| Pumping, Laser | [1], |
| Q, | |
| Quantity; of energy | [1], |
| Quantum efficiency; LED's | [1], |
| Quantum wire | [1], |
| Quantum wire; Si | [1], |
| Quartz | [1], |
| Quartz; phase diagram | [1], |
| Quasi Fermi energy | [1], |
| Quasi particles | [1], [2], [3], |
| Quaternary compound semiconductors | [1], |
| R, | |
| Radio frequency = high frequency | [1], |
| Radio frequency identification device | [1], |
| Radius of curvature; film stress | [1], |
| Rapid thermal processing | [1], |
| Raw silicon | [1], |
| RC time constant | [1], |
| Reacitvity; measurement | [1], |
| Reactive ion beam etching | [1], |
| Reactive ion etching | [1], |
| Reactive sputtering | [1], |
| Reactivity of Si | [1], |
| Recombination center | [1], |
| Recombination channel | [1], [2], |
| Recombination coefficient | [1], |
| Recombination volume | [1], |
| Recombination zone | [1], [2], |
| Reconstruction_surface | [1], |
| Red-Green-Blue | [1], |
| Reflectometry | [1], |
| Reliability; and MEMS | [1], |
| Resist | [1], [2], |
| resist development | [1], |
| Resists | [1], |
| Resolution limit | [1], |
| Resonance; in MEMS gyros | [1], |
| Reticle | [1], [2], |
| Reticles | [1], |
| Reverse dark current; solar cell | [1], |
| RF MEMS | [1], |
| Rock crystal | [1], |
| Roor mean square; for measuring roughness | [1], |
| Rough substrates | [1], |
| Roughness; average | [1], |
| Roughness; root mean square | [1], |
| Rows in module matrix | [1], [2], |
| Rutherford back scattering | [1], |
| S, | |
| Sacrificial layer | [1], |
| Sacrificial layers | [1], |
| Samsung | [1], |
| Saving the world | [1], |
| Scanning electron microscope | [1], |
| Scanning Tunneling Microscope | [1], [2], [3], |
| Scanning_electron_microscope | [1], |
| Screen oxide | [1], |
| Screen-printing | [1], |
| Secondary energy | [1], |
| Seed crystal | [1], |
| Segregation coefficient | [1], |
| Selectivity in etching | [1], |
| Selectivity; of etching rates | [1], |
| Selectivity;_sensor | [1], |
| Selenium; elemental semiconductor | [1], [2], [3], |
| Semiconductor Industry Association | [1], |
| Semiconductor Laser | [1], |
| Semiconductors; and components or products | [1], |
| Sensor; MEMS | [1], |
| Sensors; and semiconductor properties | [1], |
| Sensors; MEMS | [1], |
| Series resistance | [1], |
| Series resistance; solar cells | [1], [2], [3], |
| Shallow trench isolation | [1], [2], |
| Short circuit current; solar cell | [1], [2], [3], |
| Short circuit; solar cell | [1], |
| Shrink strategy | [1], |
| Shunt resistance | [1], |
| Shunt resistance; solar cell | [1], |
| Shunt resistor | [1], |
| Shunt; in solar cells | [1], |
| Si precipitates | [1], |
| Siemens | [1], |
| Siemens AG | [1], [2], |
| Siemens process | [1], [2], |
| Signal LED's | [1], [2], |
| Silicide | [1], |
| Silicon | [1], [2], |
| Silicon nitride | [1], |
| Silicon on insulator | [1], [2], |
| Silicon; elemental semiconductor | [1], |
| Silicondioxide | [1], [2], |
| Silicone nitride | [1], |
| Silicone nitride deposition | [1], |
| Sintering contacts; solar cells | [1], |
| Sintering; for solar cell contacts | [1], |
| SiO2; phase diagram | [1], |
| Slave; and power | [1], |
| Slave; as energy source | [1], |
| Snell's law | [1], |
| So crystasl | [1], |
| Solar cell; amorphous Si | [1], |
| Solar cell; and semiconductor property | [1], |
| Solar cells | [1], |
| Solar cells; alterative substrates | [1], |
| Solar cells; as market drivers | [1], |
| Solar cells; thin film | [1], |
| Solar energy | [1], |
| Solar grade Si | [1], |
| Source | [1], |
| Source of a MOS transistor | [1], |
| Space chareg region; of solal cell | [1], |
| Specific heat; measurement | [1], |
| Sphalerite | [1], [2], [3], |
| Spike | [1], |
| Spiking | [1], |
| Spin-on coating | [1], |
| Spin-on glass | [1], [2], [3], |
| Spin-on technique | [1], |
| Spontaneous emission of a photon | [1], |
| Sputtering | [1], |
| Sputtering techniques | [1], |
| Staebler-Wronski effect | [1], |
| Standard international unit | [1], |
| Standing wave, Laser | [1], |
| Stepper | [1], [2], |
| Steps; atomic | [1], |
| Sticking coefficient | [1], [2], |
| Stiction | [1], |
| Stiction; and gas etching | [1], |
| Stimulated emission of a photon | [1], |
| Stoney formula | [1], |
| Stop planes; anisotropic etchung | [1], |
| Storage; of energy | [1], |
| Stranski-Krastanov growth mode | [1], |
| Stress and strain; measurement | [1], |
| Stress avoidance; MEMS | [1], |
| Stress relaxation | [1], |
| Stress, strain detection; MEMS | [1], |
| Sun | [1], |
| Surface cleaning; solar cell | [1], |
| Surface reconstruction | [1], |
| Surface roughening; solar cell | [1], |
| Surface tension | [1], |
| T, | |
| Table of Contents | [1], [2], |
| Tandem cells | [1], |
| Target | [1], |
| Teflon: bad adhesion | [1], |
| Temperature budget | [1], |
| Terawatt; the global power unit | [1], |
| Ternary compound semiconductors | [1], |
| Terra | [1], |
| Tetraethylorthosilicate | [1], |
| Thermal actuators | [1], |
| Thermal conductivity | [1], [2], [3], |
| Thermal couples; MEMS | [1], |
| Thermal expansion coefficient; measurement | [1], [2], |
| Thermal properties; measurement | [1], |
| Thermal ransfer | [1], |
| Thermal_oxidation | [1], |
| Thermal_oxidation_ | [1], |
| Thermoelectric coefficients | [1], |
| Thermoelectric devices; and semiconductor property | [1], |
| Thick film technology; definition | [1], |
| Thickness, roughness; measurements | [1], |
| Thin film Si solar cell | [1], |
| Thin film solar cells | [1], |
| Thin film technology; definition | [1], |
| Thin film; meaning | [1], |
| Thin films; special structures | [1], |
| Thin flims | [1], |
| Three level system | [1], |
| Threshold voltage | [1], |
| Time constant | [1], |
| Time constant: from RC | [1], |
| Titanium Nitride | [1], |
| Toaster; and power | [1], |
| Topology; thin film | [1], |
| Transistor radio | [1], |
| Transistors; in IC | [1], |
| Transmisison electron microscope | [1], |
| Transmission electron microscope | [1], |
| Transparent conductive oxide; solar cell | [1], |
| Trench_capacitor | [1], |
| Trench_capacitor_ | [1], |
| Trichlorosilane | [1], |
| Trichlorosilane_ | [1], |
| Triple junction solar cell | [1], |
| Tungsten | [1], |
| Tungsten CVD | [1], |
| Two diode model; of solar cell | [1], |
| U, | |
| Ultra-high vacuum; MBE | [1], |
| Ultraviolet light | [1], |
| Uncertainty relaltion; for Lasers | [1], |
| Uniformity: measurement | [1], |
| Unipolar transistors | [1], |
| Universal solvent; Si as | [1], |
| Uranium | [1], |
| V, | |
| van der Waaks bonding | [1], |
| Very large scale integration | [1], |
| Via; connectio between two metal layers in ICs | [1], |
| Viscous flow; and stress relaxation | [1], |
| Visible light | [1], |
| Vollmer-Weber growth mode | [1], |
| W, | |
| Wacker Siltronic | [1], [2], |
| Wafer | [1], [2], |
| Wafer flat | [1], |
| Wafer, definition | [1], |
| Wafer; Si | [1], |
| Wafers | [1], |
| Wafer_bonding;_MEMS | [1], |
| Warpage; of substrates | [1], |
| Watch, mechanical; and Si | [1], |
| Water glass | [1], |
| Watt; definition | [1], |
| Wavelength; LED's | [1], |
| Well; for CMOS | [1], |
| Wet oxidation | [1], |
| Wetting | [1], |
| Wetting angle | [1], [2], |
| White light; and LED | [1], |
| Width of base region; parameter or speed | [1], |
| Workfunction; measurement | [1], |
| Working point; of solar cell | [1], |
| World; saving the | [1], |
| Wrong terms in micro electronics | [1], |
| Wurtzite | [1], |
| Wurtzite; definition | [1], |
| Würth, Reinhold | [1], |
| X, | |
| X-ray lithography | [1], |
| X-ray mirrors; and Si | [1], |
| Y, | |
| Yield | [1], [2], |
| Yield; in chip factory | [1], |
| Z, | |
| Zinc blende | [1], [2], |
| Zinc blende; definition | [1], |
| Zone melting | [1], |
© H. Föll (Semiconductor Technology - Script)