| Frame No Frame |
Hyperscript"Semiconductor Technology"© H. Föll Books |
Index Hyperscripts of AMAT: General Information |
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V. Münch, Waldemar: Einführung in die Halbleitertechnologie | |
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Sorry, it's in German. | |
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Covers many aspects of he course, but is a bit old (1993) | |
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Recommended; |
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Ohring; Milton Materials Science of Thin Films | |
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In the library. iwm 100; lbf 30518 | |
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Focus on making thin films | |
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Smith; Donald L. Thin Film Deposition - Principles Practice | |
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In the library. iwm 100; lbf 30608 | |
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Focus on making thin films | |
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Wolf; S. and Tauber, R.N. Silicon Processing - Vol. 1 | |
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In the library. FA 295 | |
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Thin film chapter comes close to what we do in the lecture. | |
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Heuberger; A (Editor) Mikromechanik | |
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In the library. FA 295 | |