3. Thin Films
3.1 General
3.1.1 General Remarks and Some Definitions
3.1.2 Applications of Thin Films
3.1.3 Summary to: 3.1 Thin Films - General
3.2 Mechanical Properties
3.2.1 Geometry and Topology
3.2.2 Adhesion
3.2.3 Stress and Strain
3.2.4 Summary to: 3.2 Mechanical Properties
3.3 Nucleation and Growth
3.3.1 In the Beginning
3.3.2 Nucleation and Growth Modes
3.3.3 Summary to: 3.3 Nucleation and Growth
3.4 Thin Films: Structure, Interfaces and Some Properties
3.4.1 Single Crystalline Thin Films
3.4.2 Thin Film Structure
3.4.3 Special Properties of Thin Films
3.4.4 Summary to: 3.4 Structure, Interface and Some Properties
3.5 Properties, Measurements and Characterization
3.5.1 More Properties
3.5.2 Important Techniques
3.5.3 Local Properties
3.5.4 Summary to: 3.5 Properties, Measurements and Characterization
3.6 Summary
3.6.1 Summary to: 3. Thin Films
© H. Föll (Semiconductor Technology - Script)
