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Semiconductor technology is almost synonymous with thin film technology |
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A thin film is adhering to a substrate and (at least orginally) continous. |
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Thin films may still be found in the product or may have been "sacrificed" during
the making of the product. | |
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An IC is a study of thin films in and on the Si substrate. |
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The same is true for pretty much every semiconductor product. |
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Thin always means "thin" relative to some intrinsic (internal) length
scale. Examples are: | |
- Dimensions dx, y, z
- Grain size dgrain
- Lattice constants a0
- l radiation (light, IR, UV)
- Absorption depths
- Mean free path lengths.
- Diffusion length
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- SCR width dSCR
- Debye length dDebye
- Critical thickness dcrit for
electrical break down
- Critical thickness dtu for
tunneling |
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Structural length scales | |
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Wavelength and interaction length scales |
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Transport parameter length scales | |
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Electrical scales | |
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There are many thin film applications outside of semiconductor technolgy: |
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Optical, electrical, chemical, mechanical, magnetical technologies use thin films |
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© H. Föll (Semiconductor Technology - Script)
