| Frame No Frame |
Hyperscript"Electronic Materials"© H. Föll Table of Contents |
Hyperscripts of AMAT: General Information Index |
| 1.1 Scope of the Course | |||
| General outline, relation to other courses, books | |||
| Required background knowledge | |||
| Organizational remarks | |||
| Exercises, Seminar | |||
| 1.2 Introduction to the Course | |||
| General remarks | |||
| Looking at products, components, materials | |||
| 1.3 Required Reading and Exercises | |||
| General remarks | |||
| Required Reading | |||
| 2.1 Definitions and General Properties | |||
| Metals | |||
| Alloys | |||
| Non-metals | |||
| 2.2 General Applications | |||
| Conductors | |||
| Contacts | |||
| Resistors and heating elements | |||
| 2.3 Special Applications | |||
| Thermionic emission, field effects and tunneling | |||
| Thermoelectric effects | |||
| 2.4 Ionic Conductors | |||
| General remarks | |||
| Debye length and Nernsts Law | |||
| 3.1 Definitions and General Relations | |||
| Fields, polarisation, dipoles, susceptibility, dielectric constants. | |||
| Capacitors, surface charge and dipole moments | |||
| 3.2 Mechanisms of Polarization | |||
| Electronic polarisation | |||
| Ionic polarisation | |||
| Orientation polarisation | |||
| Relation between microscopic and macroscopic quantities | |||
| 3.3 Frequency Dependence of the Dielectric Constant | |||
| Dipole relaxation | |||
| Resonant absorption | |||
| Dielectric function | |||
| 3.4 Dynamic Properties | |||
| Dielectric losses | |||
| 3.5 Dielectric breakdown | |||
| General Observation and Failure | |||
| Mechanisms | |||
| 3.6 Special Dielectrics | |||
| Piezoelectricity and related effects | |||
| Ferroelectricity | |||
| 3.7 Dielectrics and Optics | |||
| Basics | |||
| Complex index of refraction | |||
| 4.1 Definitions and General Relations | |||
| Definitions and general relations | |||
| Fields, fluxes and permeability | |||
| Origin of Magnetic Dipoles | |||
| Classifications of Interactions and Types of Magnetism | |||
| 4.2 Dia- and Paramagnetism | |||
| Diamagnetism | |||
| Paramagnetism | |||
| 4.3 Ferromagetism | |||
| Mean field model | |||
| Magnetic domains | |||
| Magnetization and domain movement | |||
| Hard and soft magnets, uses | |||
| 4.4 Technical Materials and Applications | |||
| Magnetic materials general | |||
| Magnetic data storage | |||
| 5.0 Required reading | |||
| Basic bipolar and MOS transistor | |||
| 5.1 General Aspects of Silicon Technology | |||
| Basic problems and concepts for integration | |||
| Integrated MOS transistor | |||
| Integrated CMOS transistor | |||
| 5.2 Process Integration | |||
| Chips on wafers | |||
| Packaging and testing | |||
| Management requirements | |||
| 5.3 Cleanrooms, Particles and Contamination | |||
| Cleanrooms and Defects | |||
| 5.4 Development and Production of a New Chip Generation | |||
| Money, time, and management | |||
| Working in chip development and production | |||
| Generation Sequences | |||
6. Materials and Processes for Silicon Technology
| 6.1 Silicon | |||
| Producing Semiconductor-Grade Silicon | |||
| Silicon Crystal Growth | |||
| 6.2 Si Oxide and Doping | |||
| Oxidation; LOCOS process | |||
| 6.3 Chemical Vapor Deposition | |||
| Epitaxy and CVD processes | |||
| Oxid, nitride and other CVD deposition processes | |||
| 6.4 Physical Processes for Layer Deposition | |||
| Sputter deposition and contact hole filling | |||
| Ion implantation | |||
| Miscellaneous techniques and comparison | |||
| 6.5 Etching Techniques | |||
| Chemical etching | |||
| Plasma etching | |||
| 6.6 Lithography | |||
| Basic lithography techniques | |||
| Resist and steppers | |||