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Hyperscript

"Electronic Materials"

© H. Föll

Table of Contents

Hyperscripts of AMAT:
General Information

Index

1. Introduction

1.1 Scope of the Course
General outline, relation to other courses, books
Required background knowledge
Organizational remarks
Exercises, Seminar
1.2 Introduction to the Course
General remarks
Looking at products, components, materials
1.3 Required Reading and Exercises
General remarks
Required Reading
 

2. Conductors

2.1 Definitions and General Properties
Metals
Alloys
Non-metals
2.2 General Applications
Conductors
Contacts
Resistors and heating elements
2.3 Special Applications
Thermionic emission, field effects and tunneling
Thermoelectric effects
2.4 Ionic Conductors
General remarks
Debye length and Nernsts Law

3. Dielectrics

3.1 Definitions and General Relations
Fields, polarisation, dipoles, susceptibility, dielectric constants.
Capacitors, surface charge and dipole moments
3.2 Mechanisms of Polarization
Electronic polarisation
Ionic polarisation
Orientation polarisation
Relation between microscopic and macroscopic quantities
3.3 Frequency Dependence of the Dielectric Constant
Dipole relaxation
Resonant absorption
Dielectric function
3.4 Dynamic Properties
Dielectric losses
3.5 Dielectric breakdown
General Observation and Failure
Mechanisms
3.6 Special Dielectrics
Piezoelectricity and related effects
Ferroelectricity
3.7 Dielectrics and Optics
Basics
Complex index of refraction

4. Magnetic Materials

4.1 Definitions and General Relations
Definitions and general relations
Fields, fluxes and permeability
Origin of Magnetic Dipoles
Classifications of Interactions and Types of Magnetism
4.2 Dia- and Paramagnetism
Diamagnetism
Paramagnetism
4.3 Ferromagetism
Mean field model
Magnetic domains
Magnetization and domain movement
Hard and soft magnets, uses
4.4 Technical Materials and Applications
Magnetic materials general
Magnetic data storage
 

5. Silicon Technology

5.0 Required reading
Basic bipolar and MOS transistor
5.1 General Aspects of Silicon Technology
Basic problems and concepts for integration
Integrated MOS transistor
Integrated CMOS transistor
5.2 Process Integration
Chips on wafers
Packaging and testing
Management requirements
5.3 Cleanrooms, Particles and Contamination
Cleanrooms and Defects
5.4 Development and Production of a New Chip Generation
Money, time, and management
Working in chip development and production
Generation Sequences

6. Materials and Processes for Silicon Technology

6.1 Silicon
Producing Semiconductor-Grade Silicon
Silicon Crystal Growth
6.2 Si Oxide and Doping
Oxidation; LOCOS process
6.3 Chemical Vapor Deposition
Epitaxy and CVD processes
Oxid, nitride and other CVD deposition processes
6.4 Physical Processes for Layer Deposition
Sputter deposition and contact hole filling
Ion implantation
Miscellaneous techniques and comparison
6.5 Etching Techniques
Chemical etching
Plasma etching
6.6 Lithography
Basic lithography techniques
Resist and steppers