5. General Aspects of Silicon Technology
5.0 Required Reading
5.0.1 Basic Bipolar Transistor
5.0.2 Basic MOS Transistor
5.0.3 Summary to: Required Reading to Chapter 5
5.1 Basic Considerations for Process Integration
5.1.1 What is Integration?
5.1.2 Basic Concepts of Integrating Bipolar Transistors
5.1.3 Basic Concepts of Connecting Transistors
5.1.4 Integrated MOS Transistors
5.1.5 Integrated CMOS Technology
5.1.6 Summary to: 5.1 Basic Considerations for Process Integration
5.2 Process Integration
5.2.1 Chips on Wafers
5.2.2 Packaging and Testing
5.2.3 Summary to: Chips on Wafers
5.3 Cleanrooms, Particles and Contamination
5.3.1 Cleanrooms and Defects
5.3.2 Summary to: 5.3 Cleanrooms, Particles and Contamination
5.4 Development and Production of a New Chip Generation
5.4.4 Summary to: 5.4 Development and Production of a New Chip Generation
5.5.1 Summary: General Aspects of Silicon Technology
© H. Föll (Electronic Materials - Script)