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Dirt in any form - as "particles" on the surface of wafer, or as "contamination"
inside the wafer is almost always deadly | |
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Particles with sized not much smaller than minimum feature sizes (i.e. < 10
nm in 2007) will invariably cover structures and lead to local dysfunction of a transistor or whatever. |
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Point defects like metal atoms in the Si lattice may precipitate and cause local short
circuits etc. from the "inside", killing transistors |
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One dysfunctional transistor out of 1.000.000.000 or so is enough to kill a chip! |
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Being extremely clean is absolutely mandatory for high Yields Y! |
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Use cleanrooms and hyper-clean materials! |
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It won't be cheap! | |
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© H. Föll (Electronic Materials - Script)
