7. Si MEMS

7.1 Products and Developments

7.1.1 What is MEMS?

7.1.2 A Closer Look at a Gyro

7.1.3 MEMS Sensors and Actuators

7.1.4 Summary to: 7.1 MEMS - Products and Developments

7.2 Processes and Specialities

7.2.1 Processes and Materials - General Consideration

7.2.2 Important MEMS Processes

7.2.3 Example for Process Integration

7.2.4 Summary to: 7.2 Processes and Specialities

7.3 Summary

7.3.1 Summary to 7: MEMS

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© H. Föll (Semiconductor Technology - Script)