Pictures to: Kristallfehler in hochintegrierten Schaltkreisen aus Silizium    Part 3
 

(Crystal Lattice Defects in Highly Integrated Silicon Devices)
In what follows you see the third part of the "Abbildungen" (Pictures) as they occur in the report. The scans were made from my still existing copy and some of the pictures were somewhat processed by me to improve clarity.
The figure captions are included so there is no need for further text.
     
 
Defects in IC
 
Pictures to: Kristallfehler in
 
Pictures to: Kristallfehler in
 
Pictures to: Kristallfehler in
 
Pictures to: Kristallfehler in
 
Pictures to: Kristallfehler in
 
Defects in integrated circuits
 
Defects in integrated circuits
 
Defects in integrated circuits
 
Defects in integrated circuits
 
Defects in integrated circuits
 
Defects in integrated circuits
 
Defects in integrated circuits
 
Defects in integrated circuits
 
Defects in integrated circuits
 
Defects in integrated circuits
 
Defects in integrated circuits
 
Defects in integrated circuits
   

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go to 2.4 Process Induced Defects in Si Chips (Investigated in a HVTEM)

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