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| Exercise 4.3-1 | |||
| All Questions to 4.3 |
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At the core of lithography are the steppers - optical machines for around 5 Mio € a piece | |
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Resist technology, too, is a highly developed part of lithography | |
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For some big problems simple solutions have been found. Example: reticles with pellicles |
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© H. Föll (Semiconductor Technology - Script)