4. Silicon: Special Properties and Emerging Technologies

4.1 Silicon on Insulator

4.1.1 General Remarks

	Intended Topics:
	4.1 Silicon on Insulator
		advantages and problems, basic device structure
		Modern developments Oxygen Implantation; waferbonding, smart cut technology
	4.2 Etching of Silicon
		Chemical etches Isotropic and anisotropic dissolution, defect etches and anodic etching
		Micromechanics and microsystem technology Basic considerations, special process steps
		Electrochemical etching, Porous Silicon and applications Photonic crystals, filters, sensors, microtechnology, integrated wave guides, ...
	4.3 Specialities
		Amorphes Si and applications Structural and electronic properties, H - passivation, solar cells and FPDs
		SiGe: Materials ascpects and devices HEMT, detectors (incl. Ge),

© H. Föll (Semiconductors - Script)