Where |
Title |
Ranking |
Semiconductor international / Prof. Föll |
MEMS
e-insite.net/semiconductor |
introduction,
markets, major organisations |
Materials Today / Prof. Föll |
Optical
MEMS |
fabrication,
special optical applications |
Materials Today / Prof. Föll |
Micromechanics
senses biomolecules |
biological
applications of MEMS, good |
Prof.
Föll |
Semiconductor
Micromachining – Vol. 2 (!) |
only
written book available at the faculty |
http://www.tu-harburg.de/mst/deutsch/lehre/mikrosystemtechnik/mst_eng.shtml |
Microsystem
Engineering |
Lecture
notes from Prof. Kasper, TU Hamburg-Harburg, detailed, but good |
World of
MEMS |
very
good, good links, overview etc. |
|
Memsguide.com |
mixed
site, good links |
|
Phys.Jour.
(german) 1(2002) 39 /
Library |
Mikrosystemtechnik im Automobil |
Introduction,
technique, major commercial applications |
Prof.
Föll |
Micromirrors |
Several
documents from Peter Merz, ISIT concerning MEMS micro mirrors, also demonstrators
available!! (ask Prof. Föll) |
Journal
of Micromechanics and Microengineering |
Scientific
journal on MEMS, not reviewed |
|
Semiconductor
international |
General
journal, good entry, but you have to search it |
|
Materials
Today |
Good
reviews, good entry, but you have to search it |
|
Spektrum der Wissenschaften Dossier / Prof. Föll (german) |
Mikrosystemtechnik |
old, but
much content |
Network
Microsystems European |
Europe’s
largest MEMS organisation, no substantial information |
|
MEMS
Industry group |
mostly
American MEMS industry association, good link list, business/market analysis |