MEMS material for talk

Resources:

Where

Title

Ranking

Semiconductor international / Prof. Föll

MEMS e-insite.net/semiconductor

introduction, markets, major organisations

Materials Today / Prof. Föll

Optical MEMS

 

fabrication, special optical applications

Materials Today / Prof. Föll

Micromechanics senses biomolecules

biological applications of MEMS, good

Prof. Föll

Semiconductor Micromachining – Vol. 2 (!)

only written book available at the faculty

http://www.tu-harburg.de/mst/deutsch/lehre/mikrosystemtechnik/mst_eng.shtml

Microsystem Engineering

Lecture notes from Prof. Kasper, TU Hamburg-Harburg, detailed, but good

http://www.mst-world.com/

World of MEMS

very good, good links, overview etc.

http://www.memsguide.com

Memsguide.com

mixed site, good links

Phys.Jour. (german) 1(2002) 39 / Library

Mikrosystemtechnik im Automobil

Introduction, technique, major commercial applications

Prof. Föll

Micromirrors

Several documents from Peter Merz, ISIT concerning MEMS micro mirrors, also demonstrators available!! (ask Prof. Föll)

http://www.iop.org/EJ/S/3/249/journal/0960-1317

Journal of Micromechanics and Microengineering

Scientific journal on MEMS, not reviewed

http://www.e-insite.net/semiconductor/

Semiconductor international

General journal, good entry, but you have to search it

http://www.materialstoday.com

Materials Today

Good reviews, good entry, but you have to search it

Spektrum der Wissenschaften Dossier / Prof. Föll (german)

Mikrosystemtechnik

old, but much content

http://www.nexus-emsto.com/

Network Microsystems European

Europe’s largest MEMS organisation, no substantial information

http://www.memsindustrygroup.org

MEMS Industry group

mostly American MEMS industry association, good link list, business/market analysis

 

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