Books Overview 2000/2001 Index |
Backbone, Books and SeminarMasterdocument |
Link to Matrix of Modules |
Running planning sheet; takes precedence to other documents containing the backbone
Blau im Unterkapitel: Seminarthema
Zahlenlinks: Literatur
1. Introduction | |||
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1.1 Scope of the Course | ||
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Goals and content | ||
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Relation to other courses: - Introduction to Materials Science I + II - Semiconductor Technology - Electronic Materials - Others |
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Required background knowledge - Math - Physics/Materials Science - Others |
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Timetable, exercises, homework and seminar
- Format of exercises - Exams and grading |
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1.2 Semiconductors and Technology | Semiconductor Products and Materials | |
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General remarks; important markets and products | Findet jemand zu
diesem und den nächsten beiden Punkten eine Übersicht? |
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Mainstream semiconductor materials and technologies | ||
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Exotic and upcoming semiconductors, products and technologies |
2. Basic Semiconductor Physics | |||
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2.1 Free Electron Gas, Periodic Potential, and Basic Band Structure | ||
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Density of states, Fermi distribution, | MaWi II Script and Notes. | |
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Periodic potential, Bloch theorem | ||
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Basic Band Structures, Direct and indirect transitions | ||
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Doping, holes and electrons, Fermi level, carrier generation and recombination, mass action law, conductivity, life time and diffusion length | General: 19; 16 | |
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2.2 Junctions and Simple Theory | ||
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p-n-junction. | MaWi II Script and Notes. 19; 16 |
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solar cell, bipolar transistor, Schottky and ohmic contacts | ||
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2.3 Elements of Advanced Theory | ||
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Effective masses, Shockley-Read-Hall recombination, carrier mobilities, quasi Fermipotentials | SRH Recombination: 1 und 16; 17 for advanced | |
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Mobility and conductivity Boltzmann equation and scattering processes, temperature dependence |
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Optical properties absorption, excitons, ... |
Überwiegend in kap. 6 abhandeln | |
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Limits Leakage, degeneration, tunneling, avalanche break-through |
3. Silicon: General Properties and Material Technologies | |||
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3.1 General Properties | ||
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Conductivity, lifetime and point defect dynamics
Doping methods, measurement techniques, contamination and purity considerations |
sehr kurz | |
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Diffusion Si anomaly, diffusion in theory and simulation, limits |
sehr kurz | |
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Mechanical, thermal and other properties plastic deformation, rapid processing, |
sehr kurz | |
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3.2 Crystal Growth and Wafer Production | ||
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Single Crystals and wafers growth methods, bulk defects, wafer technology |
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Polycrystalline Silicon CVD methods and Microelectronics, bull material and solar cells, flat panel displays |
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Crystal lattice defects in Si Native and process-induced defects, OSFs, technological consequences and restraints |
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3.3 Device and Product Consideration | ||
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Interfaces and contacts Si-SiO2 Interface, Si - metal, silicides |
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Scaling laws ... |
Article aus VLSI serie |
4. Silicon: Special Properties and Emerging Technologies | |||
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4.1 Silicon on Insulator | SOI -
Methods for Wafer Production SOI - Product and Technologies |
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General advantages and problems, basic device structures |
Short article: 22 und aus VLSi Serie ("Geschichte") |
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Modern developments Oxygen Implantation; waferbonding, smart cut technology; Canon technology |
mc: Bitte Überblick besorgen (auch für Seminarthemen) | |
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SOI and MEMS | ||
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4.2 Silicon Microsystems | Thema und Material von Merz | |
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General and Key Processes | Semicond. Micromaching 22 | |
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Chemical etches Isotropic and anisotropic dissolution, defect etches and anodic etching |
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Micromechanics and microsystem technology Basic considerations, special process steps |
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4.3 Specialities | Optical
Applications of Porous Silicon Photonic Crystals and Semiconductors |
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Amorphous Si and applications Structural and electronic properties, H - passivation, solar cells and FPDs |
Tanaka 25 | |
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SiGe: Materials aspects and devices HEMT, detectors (incl. Ge), |
Findet jemand eine Übersicht? Evtl. über W. Jäger? | |
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Electrochemical etching, Porous Silicon and
applications Photonic crystals, filters, sensors, microtechnology, integrated wave guides, ... |
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5. GaAs: Basics and High Speed Devices | |||
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5.1 Theoretical Aspects of GaAs | ||
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Crystallography and band structure | ||
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Mobility and other important properties | ||
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Lattice defects and variants (GaAlAs etc.), | ||
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... | ||
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5.2 Crystal Growth and Handling | ||
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Crystal growth and thin film methods Bulk crystals, epitaxy, MBE |
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GaAs specific materials and device aspects Handling (GaAs is poisonous), plastic deformation, |
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5.3 High Speed Devices | ||
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HEMT | Prost 23 | |
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... | ||
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... | ||
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6. GaAs and III-V compounds: Fundamentals of Optoelectronics | |||
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6.1 Fundamentals of Light Absorption and Emission | ||
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Recombination, light emission and absorption, wave guides | ||
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General optoelectronic device considerations LEDs, Ohmic contacts, Gate oxides, Doping, .. |
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Photonic crystals | ||
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... | ||
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6.2 LEDs and Other Optical Devices | ||
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6.3 Lasers | ||
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Fundamentals of Lasers Basic theory, inversion, feedback, modes |
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Essentials of semiconductor Lasers Requirements, technologies, lifetime and reliability |
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7. III-V Semiconductors: Materials and Device Aspects | |||
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7.1 GaP, InSb and Ternary III-V Compounds | Findet jemand dazu einen kurzen Überblick? | |
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Special material properties | ||
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Selected device aspects | ||
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7.2 GaN | ||
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Short history and specialities | ||
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Blue LEDs and Laser | ||
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7.3 Quantum Wells and Heterostructures | ||
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Theoretical aspects | ||
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Present applications | ||
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Emerging technologies and outlook |
8. Special Semiconductors, Applications and Technologies | |||
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8.1 SiC and Diamond | ||
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SiC | Artikel aus 27 | |
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Diamond and high temperature applications | ||
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8.2 Polymers | Semiconducting Polymers | |
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Theoretical and chemical aspects | ||
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Emerging applications | ||
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8.3
"Exotic" Semiconductors and Applications |
Non-Silicon Solar Cells Liquid Semiconductors Peltier Elements and Thermoelectric Generators |
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Thermoelectronics Peltier elements, thermoelectronic generator |
Bitte dazu Übersichten suchen. Vor wenigen Jahren war dazu was längeres im Scientific American | |
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High temperature electronics | Bitte Seegebrecht um Übersichtsartikel bitten | |
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Se and copying machines | Bitte dazu Übersichten suchen. | |
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II-VI and chalkogenides | Bitte dazu Übersichten suchen. | |
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Very exotic: Liquid semicondurctors | Bitte dazu Übersichten suchen (es gab mal ein Buch) |