6"-etch-cell for macropores on p-type-silicon
   
2000 First results
  November 2000: We etched the first time a 6in. p-type wafer in our test cell.  
       
  Our first wafer !!  
       
    Happy  
       
    SEM micrograph of the sample  
       
       
    62 etch cell  
    This is a first setup for a 6" p-macropore etch cell.