(1) Most important for the description of cheamical reachtion in the high anodic bias regime where a closed oxid layer is always present is the following continuity equation:
The local thickness s(x,y,t) of the oxide layer is increased by an anodic oxide generating current Jox (b is a purely geometrically defined parameter) . It decreased by purely chemical dissolution with a dissolution rate a.
The oxide growth starts at an upper critical electric field
strength Emax at low oxide thicknesses smin and it stopps at a lower critical electric field
strength Emin at a maximum oxide thicknesses smax
Fig. 3
 |
 |
 |